INO has the equipment and the expertise to handle the entire microsystem development cycle. From the simulation, design, and fabrication of microdevices through to their packaging and characterization, INO offers value-added solutions at every step. The value comes from our multidisciplinary teams, our critical mass of optical and microfabrication experts, our flexible and innovative fabrication processes, and our ability to combine microsystems with state-of-the-art control modules.
We put our cutting edge expertise to work for our clients with a specific objective in mind: to improve their competitive position and bottom line.
Electrooptomechanical integration at the micron level
Our teams have already designed and produced a variety of microoptical devices, including microbolometers, micromirrors, optical microbenches and microshutters. In many cases, these microsystems have been built directly on CMOS integrated circuits from various North American foundries. To ensure user-friendlyness they are integrated with various customized elements such as dedicated electronics and control software.
From design to fabrication: a rigorous process
Designing microsystems and the corresponding photomasks always starts with the simulation of the mechanical, electromechanical, thermal, or optical behavior of each component. INO uses leading-edge software such as Intellisuite and ANSYS to perform these simulations.
The fabrication processes we use to build microdevices are innovative and flexible. They include
- Surface micromachining with a polyimide sacrificial layer
- Electroplating-based micromachining
- Bulk micromachining on various substrates
Our teams enjoy access to over 430 m2 of class 100, 1000, and 10000 clean rooms; semi-automatic systems for thin film deposition and etching; and photolithographic equipment for processing substrates up to 150 mm in diameter. Our extensive expertise in packaging also allows us to offer a wide variety of solutions ranging from simple off-the-shelf packaging in an inert atmosphere to customized vacuum packaging with an integrated temperature-control device.
The perfect place for microsystem testing
Our multidisciplinary know-how and wide array of characterization equipment make INO the perfect partner for microsystem testing. Our equipment includes
- Scanning electron microscope
- Interferometric microscope
- Infrared detector characterization test bench
- Electrical probing stations
- And more
Take a look at our various achievements and discover the range of possible applications or contact us to find out how we can meet your specific needs.