Institut national d’optique - INO

S. Ilias, F. Picard, K. Le Foulgoc, J. Osouf, C. Larouche, J-S. Caron, P. Topart, S. Garcia Blanco, D. Vincent, J.-F. Lepage, B. Gilbert "Large diameter dual-axis MEMS-based mirror for laser beam steering" Proc. of SPIE, 7930, art. no 79300Q, 2011