At INO, the presence of a multidisciplinary team and state-of-the-art equipment allows us to offer unique MEMS foundry-type services. These services include design, prototyping, fabrication, packaging, and testing of various MEMS and MOEMS devices. Device design starts with the evaluation of different structures adapted to a given application. Computer simulation tools and commercial or custom software are used to evaluate the mechanical, optical, thermal, and electromechanical performances. Standard IC manufacturing techniques such as metal, dielectric, and semiconductor film deposition and etching as well as photolithographic pattern transfer are available. More details on INO’s fabrication technologies are provided in the Beam shaping section. Metals such as Au, Ag, Al, Al alloys, Ti, Cr, Cu, Mo, MoCr, Ni, Pt, and V can also be deposited with thickness varying from 5 nm to 2 µm and uniformity in the 2% range. In addition, to answer a customer's needs for broadband microbolometric detectors, INO has developed and built a gold black deposition facility. This gold black facility is now available to all our clients.
We also offer selective electroplating, and molding to customers. What’s more, INO has developed strong expertise in MEMS packaging to ensure device hermeticity while keeping a window open to the outside world. This multifaceted expertise has been put to use manufacturing various types of MEMS devices as well as complex instruments including micromirror-type devices, microfilters, and multipurpose sensors.
INO also has extensive expertise in the fabrication of custom VOx-based uncooled IR bolometric detector arrays. Technology transfer is available.