S. Garcia Blanco, K. Le Foulgoc, Y. Desroches, J.-S. Caron, P. Topart, C. Alain, H. Jerominek "Wafer-level hermetic vacuum micro-packaging technology for IR detector applications" 2009 IEEE LEOS Annual Meeting Conference, p. 57-58, 2009
Abstract: A low-cost low temperature wafer-level vacuum micropackage has been developed exhibiting an equivalent flow rate of 3.8x10-14 Torr.L/sec for storage at 80ºC
View at publisher