MEMS

In the field of microelectromechanical systems (MEMS), INO stands out for its custom microfabrication processes, foundry service, wafer and chip-level post-processing expertise, vacuum packaging, and extensive technology transfer experience. 

INO creates innovative solutions in the MEMS field, particularly in infrared and terahertz imaging. Our vanadium oxide-based uncooled bolometric detectors are the perfect example. INO technologies target a wide variety of fields ranging from the life sciences and space technologies to astronomy, the environment, transportation, defense and security. No matter what the application, INO provides specialized custom MEMS solutions and monolithic on-chip integration.

INO offers a range of services, including MEMS design, modeling, microfabrication process development, prototyping and short-run fabrication, vacuum packaging, and heterogeneous assembly, as well as radiometric, electrical, and environmental testing. We can also integrate MEMS solutions into custom systems.

INO technology platforms are transferable to industry. Through our R&D work, we adapt platforms so that clients can take full advantage of the commercial opportunities and technological benefits they provide. And our bolometer technology transfer solution is one-of-a-kind.

We also excel at designing products to precise client specification, such as infrared and terahertz bolometric detectors and micromirrors.

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