Infrared Bolometer Detector

Since 1992, INO has built a solid reputation in the field of uncooled vanadium oxide infrared detectors. We offer microbolometer detector design, fabrication, characterization, and packaging, as well as in detector-to-ROIC (readout integrated circuit) interfacing technology. Infrared detectors ranging in size from 17 microns to 312 microns are now commonly customized and fabricated in our clean room facilities.

We monolithically integrate microbolometric detectors over client-supplied ROIC wafers as a foundry service, and we help you designing your own readout integrated circuits. We have developed several custom IR focal plane arrays (FPA) for clients, including the 384 x 288 pixel, 35 micron pitch array. Some FPAs, such as the 512 x 3 pixel, 39 micron pitch FPA produced for the European and Canadian space agencies, have also been developed jointly with clients.

The infrared detector technology is available for transfer under a licensing agreement. CMOS ROIC wafers used to fabricate detector FPAs are also available under a supply agreement.

Our expertise: Uncooled vanadium oxide bolometric detectors

Our strength:

A multidisciplinary and experienced team dedicated to meeting your custom design and technology transfer needs 

Fields of application:

  • Aerospace/astronomy

  • Defense and security

  • Firefighting

  • Inspection/maintenance

  • Laser beam profiling

  • Medical

  • Night vision

  • Remote sensing

  • Search and rescue

  • Transportation

Plus…

Uncooled detectors are revolutionizing infrared detection and imaging by providing reliable low-cost sensors for civilian and military applications. Compared with cryogenically cooled devices, IR bolometric detectors operated at room temperature offer competitive advantages in cost and operational convenience. Advantages of uncooled detectors include higher reliability, reduced power consumption, smaller size, and reduced weight.

Multispectral response capability is another great advantage of vanadium oxide detectors. INO has taken advantage of this feature to develop broadband detectors and extend its capacities to THz detection. Wavelengths from 3 microns to 1 mm can now be detected using INO’s technology.

One of the key pieces of equipment for obtaining broadband detectors is the gold black deposition system designed and developed by the microfabrication team. The main advantages of INO gold black is its lower thermal mass and conductance, resulting in excellent optical absorption with rapid thermal response. Gold black coating services are now offered to clients looking to increase the performance of their broadband detectors.

Finally, the versatility of INO’s detector technology has enabled our team to develop a MEMS-Pirani pressure detector using the same microfabrication process. This novel pressure detector may be monolithically integrated with the FPAs or used as a standalone device. 

Example: technology transfer to the industry

INO and Teledyne DALSA agreed on a technology transfer project that would enable Teledyne DALSA to fabricate microbolometer infrared detector arrays at its Bromont, Québec MEMS foundry, as well as to package, test, and characterise the fabricated detectors and cameras making use of them. 

“MEMS and Infrared Imaging are two strategic areas of focus for Teledyne DALSA with good growth potential. The development and full production of infrared devices in Québec will further strengthen our position as a leader in digital imaging and semiconductors, at a time when the infrared imaging market is experiencing strong growth”.

Brian Doody, CEO, Teledyne DALSA, February 2014

Available technology transfers

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