INO offers custom packaging services for MEMS/MOEMS devices based on ceramic and metallic headers. We have developed a variety of hermetic vacuum packaging technologies in order to offer you the right solution for maximizing the performance of your MEMS based on your needs.
In addition to providing ceramic and metallic packages designed for uncooled bolometric detectors and high-end military and space applications, INO can design a custom package to match your requirements. INO specializes in four main packaging technologies:
Processes are performed in state-of-the-art vacuum furnaces and systems that allow for activation of various getters. Depending on the selected technology, vacuum levels can be maintained at <10mTorr for up to 25 years.
INO offers a full range of services for all your MEMS needs:
Whether you are looking for a specific service or a fully integrated MEMS design, INO is the right partner for you. Please contact us for more information!
Uncooled microbolometric detector fabricated using INO’s 35 µm pixel pitch technology based on vanadium oxide with a resolution of 384 x 288 pixels.