INO boasts state-of-the-art facilities, equipment, and software for developing microsystems that meet our clients’ most stringent requirements. Our microelectromechanical system (MEMS) specialists start by analyzing the application under development to establish precise specifications for the desired microsystem. The team then moves on to the development cycle, which is roughly the same for each MEMS solution and comprises the following steps:

  • Design and performance simulation

  • Definition and adaptation of the process and microfabrication

  • Packaging and micropackaging, including design

  • Performance characterization

INO’s MEMS specialists have access to equipment and software tools that are well known in the industry. With our electronics and software design teams, we can offer our clients complete MEMS modules including control electronics and software. This proven approach is used to design and fabricate a wide variety of MEMS devices and modules, including microbolometers, MEMS-Pirani pressure microsensors, optical microbenches, and microshutters.

Our expertise: Turnkey MEMS modules

  • Microsystem design and simulation tailored to the desired application

  • Microfabrication and characterization of microsystems

  • Design of appropriate packaging for the application

  • Design and fabrication of control electronics

  • Design of control software and user-friendly interfaces

Our strength: Versatility

The flexibility of our multidisciplinary team and fabrication processes allows us to deliver complete MEMS modules.

Fields of application:

  • Automotive sector

  • Communications

  • RF identification

  • Biomedicine

  • Military systems

  • Aerospace

  • Astronomy

  • Smart phone sensors

  • Entertainment

Plus…

In certain cases, MEMS must be fabricated directly on the chip, which typically contains part of the control and read-out electronics. INO has worked with a number of integrated-circuit design companies and CMOS foundries to develop this capability, and can provide them with MEMS fabrication, control, or reading requirements.  Moreover, we can communicate with CMOS foundries to ensure that chip wafers are suitably finished for MEMS fabrication.

In order to provide INO clients with the best possible service, we have built up a network of suppliers giving our microfabrication team access to additional fabrication processes and design software tools. We can call on these suppliers to round out our services as needed to better serve our clients.

We also offer foundry services for thin film deposition and patterning.

Available technology transfers

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