L. N. Phong, J. Lee, W. Zheng, T.D. Pope, C. Alain, S. Ilias, H. Jerominek "Next generation microbolometers for high resolution remote sensing" International Conference on MEMS, NANO and Smart Systems, ICMENS, :197-198, 2005
Résumé: We describe our recent work on improving the time constant and NETD of uncooled microbolometer detector. Such improvement would enable infrared remote sensing with a spatial resolution better than 150 m from low earth orbits. Radiometric simulation of the new microbolometer designs shows that reduction of time constant by a factor of 3 and reduction of NETD by a factor of 1.5 can be achieved. Linear arrays of 512×3 microbolometers embedding the new designs have been fabricated for experimental validation.
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