H. Oulachgar, L. Marchese, C. Alain, P. Topart, S. Ilias, B. Tremblay, M. Bolduc, F. Williamson, F. Généreux, L. Le Noc, J. Osouf, T. Pope, H. Jerominek, A. Bergeron "Development of MEMS microbolometer detector for THz applications" 35th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2010, art. no 5612408 , 2010
Résumé: INO has been actively working on extending its microbolometer technology to THz applications. Several techniques have been developed recently to improve the performance of the microbolometer. This article will present these techniques and discuss some potential applications of INO THz microbolometer.
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