INO’s MEMS-Pirani pressure microsensor is an invaluable tool in vacuum packaging process development and performance assessment. This solution for measuring internal cavity pressure over time is a non-destructive method with a lower leak rate detection than conventional tests.
It can be used in a variety of general applications and for hermetic vacuum package monitoring and vacuum pressure measurements in the semiconductor and coating industries. It can also be integrated in various pressure control systems.
- Extended measuring range
- Easy integration
- Low ambient temperature sensitivity
- Turnkey control software
Our patented measurement method is embedded in a commercially available and user-friendly software, providing direct pressure measurements based on calibrated sensor data. Contact us for a quote!