MEMS-Pirani Pressure Microsensor and Control Software

  • MEMS-Pirani Control Software Screenshot
  • MEMS-Pirani Integration Illustration

INO’s MEMS-Pirani pressure microsensor is an invaluable tool in vacuum packaging process development and performance assessment. This solution for measuring internal cavity pressure over time is a non-destructive method with a lower leak rate detection than conventional tests.

It can be used in a variety of general applications and for hermetic vacuum package monitoring and vacuum pressure measurements in the semiconductor and coating industries. It can also be integrated in various pressure control systems.

ADVANTAGES

  • Extended measuring range
  • Ultra-compact
  • Easy integration
  • Low ambient temperature sensitivity
  • Turnkey control software

FURTHERMORE

Our patented measurement method is embedded in a commercially available and user-friendly software, providing direct pressure measurements based on calibrated sensor data. Contact us for a quote!

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