MEMS Foundry Services

Whether you need a highly specialized service or a fully integrated MEMS/MOEMS (MicroElectroMechanical/MicroOptoElectroMechanical system) fabrication process, we have the resources and expertise to help you reach your goals. Our class 100, 1,000, and 10,000 clean rooms are equipped for the processing of 100, 150, and 200 mm substrates.

Here is a list of some of the MEMS/MOEMS services we provide:

• MEMS design
• Simulation (optical and mechanical)
• Surface micromachining with multiple sacrificial layers
• Heterogeneous assembly
• Prototyping and short-run production
• Testing and characterization
• Wafer-level vacuum probing
• Hermetic vacuum packaging

We also provide foundry services for optical thin film deposition and patterning and gold black deposition services.

We have developed extensive know-how in the integration of MEMS with CMOS electronics by working closely with readout integrated circuit design experts and CMOS foundries, particularly in the area of vanadium oxide microbolometers. We can help you with:

• Design of mixed-signal CMOS ICs compatible with MEMS
• CMOS foundry selection
• Integration of MEMS with CMOS circuits
• CMOS wafer post-processing
• Si-photonics wafer post-processing
• Testing and characterization
• Technology transfers

We offer short- to medium-run production, as well as packaging services for single or multiple devices. Many of our facilities can handle cross-contamination of certain materials such as gold, which opens new doors for the development and integration of specific MEMs.

Our MEMS foundry service is extremely flexible as a result of our extensive experience in MEMS design and integration, and the stability of our staff and processes are key factors in the continuous development of this expertise.

Working closely with specialized partners, we have built a network of reliable suppliers to complement our skills and production capacity so we can provide you with the best and most comprehensive service possible.

MEMS are small-scale electromechanical devices that act as environmental sensors or actuators. They are used in a range of applications—including infrared camera (microbolometers), motion detection (gyroscopes, accelerometers), pressure sensors, microphones, etc.—and a variety of fields:

• Defense and security
• Environment
• Transport
• Biomedicine

For more information, please contact us.