INO offers a complete range of MEMS/MOEMS foundry services. Whether you need a very specific service or a fully-integrated MEMS creation process, we have the resources and expertise to help you reach your goals and deliver results. Our state-of the-art MEMS foundry clean room facility is perfectly adapted to the processing of 6″ and 8″ silicon substrates.

As a MEMS foundry, our services include, but are not limited to:

  • Design
  • Simulations
  • Integration of MEMS with CMOS electronics
  • Surface micromachining with multiple sacrificial layers
  • Heterogeneous assembly
  • Prototyping and mini-series production
  • Testing and characterization
  • Hermetic vacuum packaging

We also provide foundry services for optical thin film deposition and patterning, as well as gold black deposition services.

Our expertise: Integration of MEMS with CMOS readout integrated circuits (ROIC)

INO has developed extensive know-how in the integration of MEMS with CMOS electronics by working closely with ROIC design companies and CMOS foundries. By combining this know-how with our experience in microbolometer design and assembly, we have developed very specific expertise regarding the integration of vanadium oxide microbolometers with CMOS ROIC. We can help you in many different ways:

  • Support in the design of mixed-signal CMOS ICs compatible with MEMS
  • CMOS foundry selection
  • Integration of MEMS with CMOS circuits
  • CMOS wafer post-processing
  • Si-photonics wafer post-processing
  • Testing and characterization
  • Technology transfer

We offer short- to medium-run production, as well as packaging services for single devices or mini-series. We also tolerate cross-contamination of certain materials such as gold in our facility, opening new doors for the development and integration of specific MEMS.

Our strength: Stability and flexibility

Our MEMS foundry service is extremely flexible thanks to our extensive experience in MEMS design and integration, and the stability of our staff and processes are key factors in the continuous development of this expertise. Thanks to our close collaboration with specialized partners, and in order to provide you with the best service, we have built a network of reliable suppliers ready to complement our skills and production capacity.

Fields of application

MEMS have the capacity to combine functions to save space and energy. They bring invaluable solutions to many fields, including:

  • Defense & security
  • Environmental
  • Transportation
  • Biomedical

Furthermore

For more information about our MEMS foundry capabilities, please have a look at our microfabrication equipment list or contact us.

What are your needs?

What are your needs?

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