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TFLN Photonic Chip Foundry

Accelerate the development of your integrated photonic circuits on Thin-Film Lithium Niobate (TFLN) with our foundry services.

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INO offers its foundry services to technology companies, universities, and other organizations. Its TFLN (Thin-Film Lithium Niobate) integrated photonic chip platform combines advanced microfabrication, R&D flexibility, and recognized expertise in microsystem integration.

A TFLN Platform to Turn Your Designs into Functional Photonic Circuits

Access Modes to the TFLN Foundry

Initial PDK available through private projects.

  • MPW (Multi-Project Wafer)
    Shared access to the TFLN platform.
  • Proprietary Short-Run Production
    R&D partnership for proprietary short-run manufacturing.
  • À la Carte Services
    TFLN etching, microfabrication, optical and electrical characterization, and packaging.

INO continuously develops its TFLN PIC platform to deliver an integrated value chain covering design, fabrication, testing, and packaging of integrated photonic circuits.

 

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Our Ambition

Supporting our clients in transforming their photonic concepts and designs into functional, tested circuits by combining:

Expertise

Advanced expertise in microfabrication processes.

Flexibility

High technological flexibility.

Collaboration

A collaborative approach focused on performance and future industrialization.

Overview of Our Key Technical Capabilities

840 m² of cleanroom facilities

Foundry dedicated to the microfabrication of TFLN-based PICs and other MEMS, compatible with 150 and 200 mm wafers.

35 years of experience

Supporting monolithic MEMS integration on CMOS wafers, fabrication of PICs on CMOS and TFLN wafers, and post-processing of PICs on SOI wafers.

Advanced process expertise

In etching, lithography, thin-film deposition, and micro-assembly.

Wafer-level and die-level testing

capabilities.

Heterogeneous, hermetic, and vacuum packaging capabilities

including optical alignment.

typical Applications

INO’s microfabrication services are intended for, but not limited to, the following sectors:

  • Telecommunications and datacom
  • Artificial intelligence and photonic computing
  • Space
  • Quantum technologies
  • Biomedical technologies
  • Research and development
  • Emerging photonic applications

Example Use Cases

INO’s microfabrication services are well suited for, among others:

Integrated photonic modules

implementing a wide range of photonic functions.

Advanced optical microsystems

requiring packaging, fibre-to-chip coupling, or opto-electronic integration.

Why Choose INO?

  • Dedicated TFLN platform for integrated photonic circuits
  • Processing of 100, 150, and 200 mm wafers
  • ISO Class 100, 1,000, and 10,000 cleanrooms
  • Heterogeneous, hermetic, and vacuum packaging, including optical alignment
  • Flexible and fast R&D approach: prototyping, short-run production, MPW
  • Network of specialized technology partners
  • Proven experience with major players in the telecom, datacom, and quantum sectors
  • Ability to collaborate with fabless companies, start-ups, and universities
  • Canada’s only TFLN foundry, offering a strategic local footprint
  • Certifications: ISO 9001, ISO 14644-1, and ESD ANSI S20.20
    Compliance with PMC/CGP, ESA ECSS, and ISO 13485 available as required
  • Expertise in monolithic fabrication on CMOS wafers

INO, founding Partner of FABrIC

INO, together with Aeponyx, EXFO, and C2MI, is among the beneficiaries of the FABrIC program—a major initiative aimed at establishing Canadian capabilities for prototyping and manufacturing integrated circuits on TFLN.

Managed by CMC Microsystems, FABrIC is a five-year initiative ($223 million) designed to strengthen Canada’s sovereignty in the semiconductor sector.

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