MEMS-Pirani Pressure Microsensor and Control Software

  • MEMS-Pirani Control Software Screenshot
  • MEMS-Pirani Integration Illustration

INO’s MEMS-Pirani pressure microsensors are invaluable tools in vacuum packaging process development and performance assessment. This solution for measuring internal cavity pressure over time is a non-destructive method with a lower leak rate detection than conventional tests.

It can be used in a variety of general applications and for hermetic vacuum package monitoring and vacuum pressure measurements in the semiconductor and coating industries. It can also be integrated in various pressure control systems.


  • Extended measuring range
  • Ultra-compact
  • Easy integration
  • Low ambient temperature sensitivity
  • Turnkey control software


Our patented measurement method is embedded in a commercially available and user-friendly software, providing direct pressure measurements based on calibrated sensor data. Contact us for a quote!

You have a project in mind? Talk with our specialists.

You have a project in mind? Talk with our specialists.

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