MEMS-Pirani Pressure Microsensor

INO’s MEMS-Pirani technology allows you to detect leak rates at lower limits than conventional tests. It provides a non-destructive method for measuring internal cavity pressure over time and is suitable for a wide variety of applications.


The technology can be used for hermetic vacuum package monitoring and vacuum pressure measurement in the semiconductor and coating industries. It can also be integrated into various pressure control systems. The MEMS-Pirani pressure microsensor is an invaluable tool.

Software and method

  • Our reading unit features user-friendly software that provides direct pressure measurements based on calibrated sensor data.
  • Easily integrated thanks to its ultra-compact design, the MEMS-Pirani sensor boasts an extended measuring range, low ambient temperature sensitivity, and intuitive control software to provide a comprehensive, turnkey solution!


  • Pressure range 1 x 10-3 Torr to 760 Torr
  • Dimensions 2 mm x 2 mm x 0.7 mm
  • Response time <100 ms

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