INO’s MEMS-Pirani technology allows you to detect leak rates at lower limits than conventional tests. It provides a non-destructive method for measuring internal cavity pressure over time and is suitable for a wide variety of applications.
The technology can be used for hermetic vacuum package monitoring and vacuum pressure measurement in the semiconductor and coating industries. It can also be integrated into various pressure control systems. The MEMS-Pirani pressure microsensor is an invaluable tool.
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