We offer custom packaging services for MEMS/MOEMS devices. We have developed a variety of hermetic vacuum packaging technologies to optimize the performance of your MEMS according to your needs.
In addition to ceramic and metallic packages specially designed for uncooled bolometric detectors and high-end military and space applications, we can put together a custom package to your specifications. INO specializes in three main packaging technologies:
Packaging operations are performed using state-of-the-art vacuum furnaces and systems that allow for the activation of various types of getters. Depending on the technology used, vacuum levels can now be maintained at < 10 mTorr for up to 25 years.
We offer a full range of services for all your MEMS needs: