MEMS Foundry Service

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Infrared Bolometer Detector

Detection and Correction of a Loss of Calibration of Microbolometer Thermal Imaging Radiometers

Method of Fabricating a Suspended Microstructure with a Sloped Support, and a Suspended Microstructure Fabricated by the Method

Microbridge Structure for Emitting or Detecting Radiations and Method for Forming Such Microbridge Structure

Uncooled Microbolometer Pixel and Array for Configurable Broadband and Multi-Frequency Terahertz Detection

Thermal Radiation Detectors with Carbon-Nanotube-Based Optical Absorbers

Microbolometer detectors and arrays for printed photonics applications

Thin Film Deposition of Hermetic Solder Layers

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