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Microfabrication

MEMS

MEMS Foundry Service

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Infrared Bolometer Detector

Detection and Correction of a Loss of Calibration of Microbolometer Thermal Imaging Radiometers

Method of Fabricating a Suspended Microstructure with a Sloped Support, and a Suspended Microstructure Fabricated by the Method

Microbolometer Detector with High Fill Factor and Transducers Having Enhances Thermal Isolation

Microbridge Structure for Emitting or Detecting Radiations and Method for Forming Such Microbridge Structure

Uncooled Microbolometer Detector and Array for Terahertz Detection

Uncooled Microbolometer Pixel and Array for Configurable Broadband and Multi-Frequency Terahertz Detection

MEMS Packaging Services

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Thin Film Deposition of Hermetic Solder Layers

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